ME119
Introduction to Microelectromechanical Systems
(MEMS)

Design Project

• Small Project: Design of Microelectromechanical Systems by Using MUMPs
  The purpose of this project is to use the MUMPs service provided by MCNC, North Carolina, to exercise your design experiences of MEMS. You will need to use an IC layout software such as CADENCE, KIC, MAGIC, LEDIT or others to draw your designs of microstructures. Depending on the enrollment of the class, an area of 1000um X 1000um is expected for each student to make your own microdevices. You are encouraged to do a good design (a new microstructure of your own) and your grade will be judged on the effort you put into the design layout.
• Final Project: Design and Analysis of MEMS
  The purpose of this project is to exercise your imagination of MEMS. You can continue working on the small project by using the MCNC surface micromachining processes. Or you can change your topic to have different processes such as bulk-micromachining, LIGA or others. You are encouraged to use new concept, design new microstructures. Reports that only discuss things we have covered in the class generally get lower grades. Final presentations are in the last week of the class.