| Lec. | Date | Subject | Reading | Course Notes | Internet | Papers | HWs |
|---|---|---|---|---|---|---|---|
| 1 | 08/24 | Introduction | Chapter 1 | Class1 | MEMSCAP-MUMPs | ||
| 2 | 8/29 | Lithography | Chapter 2 | Class2 | SEMs | paper 1 | |
| 3 | 8/31 | Lithography | Chapter 2 | Class3 | MUMPs Process | ||
| 4 | 9/5 | Oxidation | Chapter 3 | Class4 | PolyMUMPs-references | paper 2 | HW #1 |
| 5 | 9/7 | Oxidation | Chapter 3 | Class5 | MUMPs FAQ | ||
| 6 | 9/12 | Oxidation, Pin-joints | Chapter 3 | Class6 | MEMS Industry Group | ||
| 7 | 9/14 | CAD Tools for MEMS | Chapter 3 | Class7 | SmallTimes | paper 3 paper 31 | HW #2 |
| 8 | 9/19 | Comb Resonators | Chapter 3 | Class8 | MUMPs Schedule | HW #2 Example | |
| 9 | 9/21 | Comb Resonator | Chapter 4 | Class9 | MUMPs Price | paper 4 | HW #2 Example |
| 10 | 9/26 | Diffusion | Chapter 4 | Class10 | Design Rules | ||
| 11 | 9/28 | Residual Stress & Hinge | Chapter 4 | Class11 | Sandia SUMMit Process | paper 5 | HW #3 |
| 12 | 10/3 | Residual Stress | Chapter 4 | Class12 | Sandia MEMS | ||
| 13 | 10/5 | Diffusion, Hinge Structures | Chapter 4 | Class13 | BSAC | Old Exam | |
| 14 | 10/10 | Heactuator | Chapter 4 | Class14 | Etching Data | paper 6 | HW #4 |
| 15 | 10/12 | Scratch Drive, Vertical Comb | Class15 | Multiple Mode Resonator | CADproject | ||
| 16 | 10/17 | Exam I | Chapter 6 | Class16 | Tangential Drive | HW#5 | |
| 17 | 10/19 | Other Actuators | Chapter 6 | Class17 | Electromagnetic Actuator | ||
| 18 | 10/24 | Project Introduction | Chapter 5 | Class18 | Vertical Actuator | paper 7 | HW #6 |
| 19 | 10/26 | Summary of Surface-micromachining | Class19 | MUMPs Microchannels | |||
| 20 | 10/31 | Design Rules | Class20 | MEMS Jobs | paper 8 | ||
| 21 | 11/2 | Project Layouts | Class21 | Clearing House | paper 9 | ||
| 22 | 11/7 | Bulk-Micromachining | Class22 | MOSIS | |||
| 23 | 11/9 | Summary of Surface-Micromachining | Class23 | MEMS Exchange | paper 10 | HW #7 | |
| 24 | 11/14 | LPCVD & Ion Implantation | Class24 | Nanotechnology News | ImplantTable | ||
| 25 | 11/16 | LIGA Process & Review | Class25 | Nanotech Jobs | |||
| 26 | 11/21 | Exam II | Class26 | MEMS-Europe | |||
| 11/23 | Thanksgiving Holiday | ||||||
| 27 | 11/28 | Project Presentations | Class27 | OldExam2 | |||
| 28 | 11/30 | Project Presentations |
Last updated: August1 16, 2017 by Liwei Lin