Fall 2024

Introduction to MEMS(Microelectromechancal Systems)


Class Meetings

Classroom Policies

Course Descriptions:

Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device design, analysis, and mask layout

Prerequisite: Physics 7B,

Text Books:


An individual final project is required. The project proposal is due at the middle of the semester and an oral project presentation is to be held at the end of the semester.


Class Schedule

Selected Papers

Supplementary Webside


Last updated: August 15, 2023 by Liwei Lin