| Lec. | Date | Subject | Class Notes | Reading | Internet Reading | Papers | Projects |
|---|---|---|---|---|---|---|---|
| 1 | 01/18 | Introduction | Class1 | Chapter 1 | Cronos-MEMS | ||
| 2 | 01/20 | MEMS Process & Comb Resonators | Class2 | Chapter 2 | SEMs | Paper 1 | |
| 3 | 01/23 | Comb Resoantors & Accelerometers | Class3 | Chapter 3 | MUMPs Process | ||
| 4 | 01/25 | MEMS Flextures: Meandering Structure | Class4 | Chapter 3 | Sandia MEMS | Paper 2 | |
| 5 | 01/27 | Meandering Flexures & Project #1 | Class5 | Chapter 3 | BSAC | ||
| 6 | 01/30 | MEMS Flexures: Optima Design (by TA) | Class6 | Chapter 4 | MEMS in Japan | Paper 3 | Project #1 assignment |
| 7 | 02/1 | MEMS Flexures: Solving Procedures (by TA) | Class7 | Chapter 4 | Microengineering | Project Template | |
| 8 | 02/3 | MEMS Flexures: Non-linear limits; Shear and Axial Effects | Class8 | Chapter 4 | MEMS Industry Group | Paper 4 | |
| 9 | 02/6 | MEMS Flexures: Electrostatic Actuation; Derivation | Class9 | Chapter 4 | SmallTimes | ||
| 10 | 02/8 | MEMS Flexures: Electrostatic Actuation; Derivation | Class10 | Chapter 4 | Microsystems | Paper 5 | |
| 11 | 02/10 | MEMS Materials: Surface Micromachining | Class11 | Chapter 6 | MEMS Jobs | ||
| 12 | 02/13 | MEMS Materials: Stiction | Class12 | Chapter 6 | Clearing House | Paper 6 | |
| 13 | 02/15 | MEMS Materials: Device Examples | Class13 | Chapter 6 | MOSIS | ||
| 14 | 02/17 | Encapsulation and Bonding Processes - I | Class14 | Chapter 5 | MEMS Exchange | ||
| 15 | 02/22 | Encasulation and Bonding Processes - II | Class15 | Chapter 5 | i-MEMS | ||
| 16 | 02/24 | Project #1 & Design Optimization by TA | Class16 | Chapter 7 | Nanotechnology News | Paper 7 | |
| 17 | 02/27 | MEMS Optimization: Parametric Optimization by TA | Class17 | Chapter 8 | Project #2 Part 1 | ||
| 18 | 02/29 | MEMS Optimization: Parametric Optimization | Class18 | Chapter 8 | Nanotech Jobs | ||
| 19 | 03/2 | MEMS Optimization: Parametric Optimization | Class19 | Chapter 9 | Microsystems-extra | Paper 8 | |
| 20 | 03/5 | MEMS Optimization: Lagrange Multiplier | Class20 | MEMS-Europe | Project #2 Part 2 & 3 | ||
| 21 | 03/7 | MEMS Optimization: Monotonicity Analysis | Class21 | Chapter 10 | Paper 9 | ||
| 22 | 03/9 | MEMS Optimization: Monotonicity Analysis | Class22 | Handouts | |||
| 23 | 03/12 | MEMS Optimizatin: Transformation of Variables | Class23 | Handouts | Paper 10 | ||
| 24 | 03/14 | MEMS Optimization: Panelty Function | Class24 | Handouts | Project #3 assignment | ||
| 25 | 03/16 | MEMS Optimization: Steepest Descent | Class25 | Handouts | |||
| 26 | 03/19 | Project#2 Discussions (TA) | Class26 | Handouts | |||
| 27 | 03/21 | MEMS Optimization: Quadratic | Class27 | ||||
| 28 | 03/23 | Project #3 Idea, Nanogenerators | Class28 | ||||
| 29 | 04/02 | Project #3 Idea, Nanogenerators | Class29 | ||||
| 20 | 04/04 | Project #3 Idea, Nanogenerators | Class30 | ||||
| 31 | 04/06 | Project #3 Ideas | Class31 | ||||
| 32 | 04/9 | Bio Nano Fuel Cells | Class32 | ||||
| 33 | 04/11 | Integration of Nanostructures with Microsystems | Class33 | ||||
| 34 | 04/13 | Nanostructures for Sensing and Energy Applications | Class34 | ||||
| 35 | 04/16 | Nanotechnology Outlook | Class35 | ||||
| 36 | 04/18 | Nanotechnology | Class36 | ||||
| 37 | 04/20 | MEMS Packaging I | Class37 | ||||
| 38 | 04/23 | MEMS Packaging II | Class38 | ||||
| 39 | 04/25 | Project Presentation | Class39 | ||||
| 40 | 04/27 | Project Presentation | Class40 |
Last updated: Jan. 12, 2012 by Liwei Lin