ME219
Spring 2000

Microelectromechanical Systems (MEMS)

Instructors:

• Prof. Liwei Lin, Room 5126, 643-5495, lwlin@me.berkeley.edu

Class Meetings:

• Lecture, Mondays and Wednesdays, 1165 Etcheverry, 10:30 - 12:00
• Office Hours, Tuesday, Wednesday, Thursday, 2:00-3:00; Monday 3:00-4:00

Course Descriptions:

This course is aimed to provide basic understanding of integrated circuit (IC) processes and microelectromechanical systems (MEMS). Technologies including analyses, design and manufacturing processes of MEMS will be introduced. The first part of the course emphasizes on IC processes including thin film deposition, lithography and etching. The second part of the course deals with micromachining processes including surface-, bulk-micromachining, LIGA and other processes. This course consists of 3-hour lectures per week; homework; paper reading; midterm and one final project.

Prerequisite: senior/graduate standing

Text Books:

• R.C. Jaeger, "Introduction to Microelectronics Fabrication," Addison-Wesley, 1988. (required)
• M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997. (reference)
• G.T.A. Kovacs, "Micromachined Transducers - Sourcebook," McGraw-Hill, 1998. (reference)
• J.P. Uyemura, "Principle Desing of CMOS Integrated Circuits Using L-EDIT," PWS Publishing Company, 1995. (reference)
• S.M. Sze, "Semiconductor Sensors," John Wiley & Sons, Inc, New York, 1994. (reference)

Projects:

An individual final project is required. The project proposal is due at the middle of the semester and an oral project presentation is to be held at the end of the semester.

Grading:

• 25% homework and participation
• 10% paper reading
• 10% MUMPs design (CAD layout)
• 25% Midterm
• 30% final project (proposal 15%, oral presentation 15%, written report 15%)

Class Schedule

Selected Papers

Homework and Solutions

Projects

Ledit Schedule

Last updated: Jan. 30, 2000 by Liwei Lin