Wafer Bonding Processes

• Anodic Bonding

  • Temperature @~450oC, voltage @~1000 volts
  • Silicon (metal) to glass

• Fusion Bonding

  • Temperature @~1000oC
  • Silicon to silicon (glass, oxide)

• Eutectic Bonding

  • Silicon to metal (silicon-to-gold @~363oC)

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