Abstract
A simulation program implemented by CAD architecture for optimizing pressure
piezoresistance transducer (PRT) is demonstrated in this paper. It can
provide two major considerations, on-linearity and temperature effects,
in PRT design. Users can improve the PRT performance by these predicted
analysis results and tuning the related parameters. The simulation, at
the mean time, is compared with experiment. Those verify the viability
of this PRTCAD. Please be patient for the simulation results on the square
shape diaphragms. It generally takes about 20 minutes to reach one
simulation (100 points) for the design optimization plot. Moreover, the users
should change the parameters, including physical dimensions and mechanical
properties according to their own design and manufacturing processes. The development of this program is under the support of NSF award, CMS-0096003.
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